13.3 A Novel Integrated Reliability Test System for BEOL TDDB Study

Tuesday, November 13, 2012: 3:50 PM
102AB (Phoenix Convention Center)
Mr. Jifeng Chen , University of Connecticut, Storrs, CT
Dr. Peilin Song , IBM T.J. Watson Research Center, Yorktown Heights, NY
Tom Shaw , IBM T.J. Watson Research Center, Yorktown Heights, NY
Mr. Franco Stellari , IBM T.J. Watson Research Center, Yorktown Heights, NY
Lynne Gignac , IBM T.J. Watson Research Center, Yorktown Heights, NY
Chris Breslin , IBM T.J. Watson Research Center, Yorktown Heights, NY
Dirk Pfeiffer , IBM T.J. Watson Research Center, Yorktown Heights, NY
Griselda Bonila , IBM T.J. Watson Research Center, Yorktown Heights, NY
See more of: Session 13: Defect Analysis
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