Tuesday, November 13, 2012: 3:00 PM-4:15 PM
102AB (Phoenix Convention Center)
Session Chairs:
Mr. Terence Kane
and
Mr. Phil Kaszuba
3:00 PM
SIMS Analysis for the Threshold Voltage Shift of Power MOS Caused by Abnormal Dopant Diffusion
Mr. Yanhua Huang, GLOBALFOUNDRIES Singapore Pte Ltd;
Lei Zhu, GLOBALFOUNDRIES Singapore Pte Ltd;
Kenny Ong, GLOBALFOUNDRIES Singapore Pte Ltd;
Hanwei Teo, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Shuting Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Younan Hua, GLOBALFOUNDRIES Singapore Pte Ltd;
Miao Shen, GLOBALFOUNDRIES Singapore Pte Ltd;
Prof. Hao Gong, National University of Singapore;
Dr. Binghai Liu, GLOBALFOUNDRIES Singapore Pte Ltd
3:50 PM
A Novel Integrated Reliability Test System for BEOL TDDB Study
Mr. Jifeng Chen, University of Connecticut;
Dr. Peilin Song, IBM T.J. Watson Research Center;
Tom Shaw, IBM T.J. Watson Research Center;
Mr. Franco Stellari, IBM T.J. Watson Research Center;
Lynne Gignac, IBM T.J. Watson Research Center;
Chris Breslin, IBM T.J. Watson Research Center;
Dirk Pfeiffer, IBM T.J. Watson Research Center;
Griselda Bonila, IBM T.J. Watson Research Center
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