Fabrication and Characterization of Helium and Neon Ion Deposited Platinum Wires for Circuit Edit Applications

Thursday, November 15, 2012: 11:30 AM

102AB (Phoenix Convention Center)

Dr. William B. Thompson , Carl Zeiss NTS, Peabody, MA

Lewis Stern , Carl Zeiss NTS, Peabody, MA

Huimeng Wu , Carl Zeiss NTS, Peabody, MA

David Ferranti , Carl Zeiss NTS, Peabody, MA

Deying Xia , Carl Zeiss NTS, Peabody, MA

Fouzia Khanom , Carl Zeiss NTS, Peabody, MA

Prof. Philip Rack , University of Tennessee, Knoxville, TN

Mr. Michael W. Phaneuf , Fibics Incorporated, Ottawa, ON, Canada

Dr. Carlos Gonzales , University of Tennessee, Knoxville, TN

20.4 Fabrication and Characterization of Helium and Neon Ion Deposited Platinum Wires for Circuit Edit Applications