Characterization of Ion Beam Current Distribution Influences on Nanomachining

Thursday, November 15, 2012: 10:15 AM

102AB (Phoenix Convention Center)

Dr. Shida Tan , Intel Corporation, Santa Clara, CA

Mr. Richard Livengood , Intel Corporation, Santa Clara, CA

Yuval Greenzweig , Intel, Jerusalem

Dr. Yariv Drezner , Intel, Jerusalem

Roy Hallstein , Intel Corporation, Santa Clara, CA

Chris Scheffler , Intel Corporation, Santa Clara, CA

20.1 Characterization of Ion Beam Current Distribution Influences on Nanomachining