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21.4
Stress Reduction During Silicon Thinning Using Thermal Relaxation Techniques
Thursday, November 15, 2012: 2:10 PM
101AB (Phoenix Convention Center)
Ms. Heenal Patel
,
Ultra Tec Manufacturing, Inc., Santa Ana, CA
Mr. Jim Colvin
,
FA Instruments, San Jose, CA
Mr. Timothy Hazeldine
,
Ultra Tec Manufacturing, Inc., Santa Ana, CA
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Session 21: Chip Level Sample Prep
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Symposium