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20.3 Dielectric and Metal Depositions Using Xe+ Focused Ion Beams

Thursday, November 15, 2012: 11:05 AM
102AB (Phoenix Convention Center)
Dr. Chad Rue , FEI Company, Hillsboro, OR
Brieanna Carrigan , FEI Company, Hillsboro, OR
See more of: Session 20: Circuit Edit: Beam Interaction Studies
See more of: Symposium