8.8
Direct Plan View FIB Liftout for Near-Surface Defect Analysis in TEM

Wednesday, November 6, 2013: 3:55 PM
Meeting Room 230A (San Jose McEnery Convention Center)
Mr. Max L. Lifson , IBM, Essex Jct, VT
Mrs. Carla M. Chapman , IBM, Essex Jct, VT
Mr. D. Philip Pokrinchak , IBM, Essex Jct, VT
Ms. Phyllis J. Campbell , IBM, Essex Jct, VT
Mr. Greg S. Chrisman , IBM, Essex Jct, VT
Mr. Steven J. Boren , IBM, Essex Jct, VT
Dr. Renata A. Camillo-Castillo , IBM, Essex Jct, VT

See more of: Session 8: Sample Preparation and Device Deprocessing - 1
See more of: Symposium