11.5
The Unique and Completed Characteristics of Device Behaviors in the Nanoprobing Analysis and Application for LDD Missing
The Unique and Completed Characteristics of Device Behaviors in the Nanoprobing Analysis and Application for LDD Missing
Thursday, November 7, 2013: 10:55 AM
Meeting Room 230A (San Jose McEnery Convention Center)
Summary:
The developing methodology need to push the Nanoprobing to identify the accurate location for the failure device. The application to advanced SRAM, from 90nm to 20nm and below, will become getting useful for the FA. In this article, I demonstrate the postulates with completeness and uniqueness of the electrical behavior to physical characteristic. The case of LDD missing is the example to be implemented.
The developing methodology need to push the Nanoprobing to identify the accurate location for the failure device. The application to advanced SRAM, from 90nm to 20nm and below, will become getting useful for the FA. In this article, I demonstrate the postulates with completeness and uniqueness of the electrical behavior to physical characteristic. The case of LDD missing is the example to be implemented.
See more of: Session 11: Nanoprobing and Nanoscale Electrical Failure Analysis
See more of: Symposium
See more of: Symposium