11.6
A Study of Electron Beam Irradiation Influence on Device Contact Junction Characteristics of Advanced DRAM Using Atomic Force Probing

Thursday, November 7, 2013: 11:20 AM
Meeting Room 230A (San Jose McEnery Convention Center)
Mr. Wei-Chih Wang , Inotera Memories Inc., Taoyuan County, Taiwan
Dr. Jian Shing Luo , Inotera Memories Inc., Taoyuan County, Taiwan

See more of: Session 11: Nanoprobing and Nanoscale Electrical Failure Analysis
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