7.4
Simulation Studies On Fluorine Spec Limit for Process Monitoring
Tuesday, November 5, 2013: 2:20 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Dr. Lei Zhu
,
GLOBALFOUNDRIES Singapore, Singapore, Singapore
Dr. Y. N. Hua
,
GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Ramesh Rao Nistala
,
GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Ms. Yanjing Yang
,
GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. SiPing Zhao
,
GLOBALFOUNDRIES Singapore, Singapore, Singapore
Mr. Shailesh Redkar
,
GLOBALFOUNDRIES Singapore, Singapore, Singapore
Ms. Rose Ring
,
GLOBALFOUNDRIES Malta, Stillwater, NY
