7.2
Gate Leakage Characterization and Fail Mode Analysis On 20 Nm Technology Parametric Test Structures

Tuesday, November 5, 2013: 1:30 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Mr. Satish Kodali , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Gregory M. Johnson , IBM, Hopewell Junction, NY
Dr. Felix Beaudoin , IBM, Hopewell Junction, NY
Dr. Wayne Zhao , GLOBALFOUNDRIES, Hopewell Junction, NY

See more of: Session 7: Defect Characterization and Metrology
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