13.1
Application of Laser Deprocessing Techniques in Physical Failure Analysis
Application of Laser Deprocessing Techniques in Physical Failure Analysis
Thursday, November 7, 2013: 1:05 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Summary:
This paper is Applications of Laser Deprocessing Technique (LDT) for fast PFA deprocessing and for flattening unevenly-deprocessed sample. The proposed LDT has demonstrated itself to be a useful, cost-effective and simple method for delayering. LDT also demonstrated as a fast way to remove top layers.
This paper is Applications of Laser Deprocessing Technique (LDT) for fast PFA deprocessing and for flattening unevenly-deprocessed sample. The proposed LDT has demonstrated itself to be a useful, cost-effective and simple method for delayering. LDT also demonstrated as a fast way to remove top layers.