13
Session 13: Sample Preparation and Device Deprocessing - 2
Thursday, November 7, 2013: 1:05 PM-2:20 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Session Chairs:
Mr. Bryan Tracy
and
Mr. Roger Alvis
1:05 PM
Application of Laser Deprocessing Techniques in Physical Failure Analysis
Mr. Jianhua Yin, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. P.K. Tan, Globalfoundries Singapore Pte. Ltd.;
Mr. H.H. Yap, Global Foundries;
Dr. Z.H. Mai, Globalfoundries Singapore Pte. Ltd.;
Dr. Tsu Hau Ng, Globalfoundries Singapore Pte. Ltd.;
G.R. Low, Globalfoundries Singapore Pte. Ltd.;
R. He, Globalfoundries Singapore Pte. Ltd.;
Mr. Hua Feng, GLOBALFOUNDRIES Singapore Pte. Ltd;
Mr. Y.Z. Zhao, Global Foundries;
Dr. M.K. Dawood, Globalfoundries Singapore Pte. Ltd.;
H. Tan, Globalfoundries Singapore Pte. Ltd.;
Dr. Yamin huang, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Dandan wang, GLOBALFOUNDRIES Singapore Pte. Ltd;
Mr. Y. Zhou, Global Foundries;
Jeffrey Lam, Global Foundries;
Mr. Raghaw Rai, GLOBALFOUNDRIES Singapore Pte Ltd
1:30 PM
Cross Sectional Focus Ion Beam Top-Down Delayering
Mr. G.R. Low, Globalfoundries Singapore Pte. Ltd.;
Mr. P.K. Tan, Globalfoundries Singapore Pte. Ltd.;
Dr. Tsu Hau Ng, Globalfoundries Singapore Pte. Ltd.;
Mr. H.H. Yap, Global Foundries;
Mr. Hua Feng, GLOBALFOUNDRIES Singapore Pte. Ltd;
R. He, Globalfoundries Singapore Pte. Ltd.;
H Tan, Globalfoundries Singapore Pte. Ltd.;
Dr. M.K. Dawood, Globalfoundries Singapore Pte. Ltd.;
Dr. Yamin huang, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Dandan wang, GLOBALFOUNDRIES Singapore Pte. Ltd;
Mr. Y.Z. Zhao, Global Foundries;
Mr. Y. Zhou, Global Foundries;
Jeffrey Lam, Globalfoundries Singapore Pte. Ltd.;
Dr. Z.H. Mai, Globalfoundries Singapore Pte. Ltd.;
Mr. Raghaw Rai, GLOBALFOUNDRIES Singapore Pte Ltd
