11.10
Failure Analysis Due to Slightly Unetched Hard Mask Using Nano Probe

Thursday, November 7, 2013: 2:20 PM
Meeting Room 230A (San Jose McEnery Convention Center)
Jong Hak Lee , SK Hynix semiconductor Inc., Icheon, South Korea
Mr. Jong Eun Kim , SK hynix, Cheongju, South Korea
Chang Su Park , SK hynix, Cheongju, South Korea
Nam Il Kim , SK hynix, Cheongju, South Korea
Jang Won Moon , SK hynix, Cheongju, South Korea
Jong Chae Kim , SK hynix, Cheongju, South Korea
Soo Yong Son , SK hynix, Cheongju, South Korea
Kyung Dong Yoo , SK hynix, Cheongju, South Korea
Sung Joo Hong , SK hynix, Cheongju, South Korea

See more of: Session 11: Nanoprobing and Nanoscale Electrical Failure Analysis
See more of: Symposium