12.3
Fault Localization of Metal Defects With Si-CCD Camera in Analog Device Functional Failure

Thursday, November 7, 2013: 10:55 AM
Meeting Room 230B (San Jose McEnery Convention Center)
Dr. Stephane Alves , Freescale Semiconducteurs France SAS, Toulouse, Toulouse, France
Mr. Thomas Zirilli , Freescale Semiconducteurs France SAS, Toulouse, Toulouse, France
Mr. Philippe Rousseille , Freescale Semiconducteurs France SAS, Toulouse, Toulouse, France

Summary:

This paper presents a case study on photo Emission from metals and demonstrates the capability of Emission Microscopy Si-CCD camera to detect micro Metal Bridges on functional failures of Analog devices.