2.3
Fast and Precise 3D Tomography of TSV By Using Xe Plasma FIB

Monday, November 4, 2013: 1:55 PM
Meeting Room 230A (San Jose McEnery Convention Center)
Dr. Tomas Hrncir , TESCAN, a.s., Brno, Czech Republic
Mr. Lukas Hladik , TESCAN, a.s., Brno, Czech Republic

See more of: Session 2: 3D Packages
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