7.3
STEM EDX Mappings and Tomography for Process Characterization and Physical Failure Analysis of Advanced Devices

Tuesday, November 5, 2013: 1:55 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Mr. Kevin Lepinay , STMicroelectronics, Crolles, France
Dr. Frederic Lorut , STMicroelectronics, Crolles, France
Dr. Roland Pantel , STMicroelectronics, Crolles, France
Dr. Thierry Epicier , INSA Lyon, Villeurbanne, France

See more of: Session 7: Defect Characterization and Metrology
See more of: Symposium