7.6
AFM-Based Chemical and Mechanical Property Characterization of Interconnects in Semiconductors

Tuesday, November 5, 2013: 3:25 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Dr. Michael K. Lo , Anasys Instruments, Santa Barbara, CA

See more of: Session 7: Defect Characterization and Metrology
See more of: Symposium