5.6
First in Operando SEM Observation of Electromigration-Induced Voids in TSV Structure

Tuesday, November 5, 2013: 1:05 PM
Meeting Room 230A (San Jose McEnery Convention Center)
Mr. Simon Gousseau , CEA, Leti, MINATEC Campus, Grenoble, France
Dr. Stéphane Moreau , CEA, Leti, MINATEC Campus, Grenoble, France
Mr. David Bouchu , CEA Léti, Grenoble, France
Prof. Karim Inal , MINES-ParisTech CEMEF, Sophia Antipolis, France
Dr. François BAY , MINES-ParisTech CEMEF, Sophia Antipolis, France
Dr. Pierre MONTMITONNET , MINES-ParisTech CEMEF, Sophia Antipolis, France

See more of: Session 5: Case Studies and the Failure Analysis Process
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