5
Session 5: Case Studies and the Failure Analysis Process
Tuesday, November 5, 2013: 9:30 AM-4:15 PM
Meeting Room 230A (San Jose McEnery Convention Center)
Session Chairs:
Ms. Rose Ring
and
Mr. David L. Burgess
9:55 AM
Open Failure Diagnosis Candidate Selection Based On Passive Voltage Contrast Potential and Processing Cost
Mr. Atul Chittora, Globalfoundries Inc.;
Dr. Yan Pan, Globalfoundries Inc.;
Mr. C.K. Oh, Globalfoundries Singapore Pte. Ltd.;
Ohnmar Nyi, Globalfoundries Inc.;
Dr. Chuan Zhang, Globalfoundries Inc.;
Kannan Sekar, Globalfoundries Inc.;
Mr. Yinzhe ma, Globalfoundries US;
Don Nedeau, Globalfoundries Inc.;
Dr. SH Goh, GLOBALFOUNDRIES;
Seng Keat Lim, Globalfoundries Inc.;
Jeffrey Lam, Globalfoundries Singapore Pte. Ltd.;
Mr. Atul Chittora, Global Foundries
10:20 AM
Failure Analysis for SRAM Logic Type Failures
Dr. Zhigang Song, IBM;
Dr. Felix Beaudoin, IBM;
Mr. Stephen Lucarini, IBM;
Mr. John Sylvestri, IBM;
Ms. Laura Safran, IBM;
Mr. Manuel Villallobos, IBM;
Richard Oldrey, IBM - STG-MD
1:05 PM
First in Operando SEM Observation of Electromigration-Induced Voids in TSV Structure
Mr. Simon Gousseau, CEA, Leti, MINATEC Campus;
Dr. Stéphane Moreau, CEA, Leti, MINATEC Campus;
Mr. David Bouchu, CEA Léti;
Prof. Karim Inal, MINES-ParisTech CEMEF;
Dr. François BAY, MINES-ParisTech CEMEF;
Dr. Pierre MONTMITONNET, MINES-ParisTech CEMEF
