10.21
Rapid Failure Analysis of Low-Yielding Electrical Test Structures Using E-Beam Physical and Voltage Contrast Inspection

Monday, November 4, 2013
The Tech Museum
Dr. Oliver D. Patterson , IBM Systems & Technology, Hopewell Junction, NY
Mr. Shuen Cheng Chris Lei , Hermes Microvision Inc, San Jose, CA
Mr. Xiaohu Tang , Hermes Microvision Inc, San Jose, CA
Ms. Deborah A. Ryan , IBM Systems & Technology, Hopewell Junction, NY

Summary:

A procedure for rapid collection of failure analysis results for a target problem test structure using in-line physical and voltage contrast inspection is described.
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