39th International Symposium for Testing and Failure Analysis (November 3 – 7, 2013)

November 03 - 07, 2013

R. He

Globalfoundries Singapore Pte. Ltd.
Technology Development-New Technology Prototyping
Globalfoundries Singapore Pte. Ltd., 60 Woodlands Industrial Park D Street 2,
Singapore 738406.
Singapore Singapore 738406

Papers:
13.1 Application of Laser Deprocessing Techniques in Physical Failure Analysis 13.2 Cross Sectional Focus Ion Beam Top-Down Delayering