Laser Logic State Imaging (LLSI)

Monday, November 10, 2014: 1:25 PM
310 B (George R. Brown Convention Center )
Dr. Baohua Niu , Intel Corp., Hillsboro, OR
Ms. Grace Khoo , Intel Corp., Hillsboro, OR
Mr. Fernando Chapman , Intel Corp., Hillsboro, OR
Mr. Steven Chen , Intel Corp., Hillsboro, OR
Mr. Dan Bockelman , Intel Corp., Hillsboro, OR

Summary:

Infrared Emission Microscopy based logic state imaging, since its introduction in early 2000, has been an indispensable tool and technology in the advanced process technology development and design debug applications. Continuous Laser (1064nm and 1319nm lasers) based Signal Imaging and Probing (CW-SIP) Technology, since its introductions about 4 years ago, has been widely used for scan debug and probing work extensively. We report a new technology-LLSI that combines the better resolution (50% better) and high signal to noise (SnR) of the CW-SIP with the unique capabilities of the IREM based LSI to enable a unique technology that extend LSI to low voltage (<=500mV Vcc) and ultra-low leakage (<=100pA) applications.
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