Introduction of Spectral Mapping through Transmission Grating, Derivative Technique of Photon Emission

Monday, November 10, 2014: 3:40 PM
310 B (George R. Brown Convention Center )
Mr. Thierry Parrassin , STMicroelectronics, CROLLES, France
Sylvain Dudit , ST Microelectronics, Crolles, France
Michel Vallet , ST Microelectronics, Crolles, France
Dr. Antoine Reverdy , Sector Technologies, Gières, France
Dr. Herve Deslandes , DCG Systems, Fremont, CA

Summary:

We are introducing an extension technique to photo emission in order to provide more insights to the emission spots in the field of view allowing to recognize the faulty transistor or a short, a diffraction grating is incorporated in the optical path of our system so that we can display the spectrum of each emission spots in the field of view.
See more of: Photon-Based Techniques II
See more of: Symposium