1.1
Visible Light LVP on Bulk Silicon Devices

Monday, November 2, 2015: 9:30 AM
Meeting Room D135 & 136 (Oregon Convention Center )
Dr. Joshua Beutler , Sandia National Laboratories, Albuquerque, NM
Dr. Edward I. Cole Jr. , Sandia National Laboratories, Albuquerque, NM
Mr. V. Carter Hodges , Sandia National Laboratories, Albuquerque, NM
Mr. Joe Clement , Sandia National Laboratories, Albuquerque, NM
Mr. Jeff Stevens , Sandia National Laboratories, Albuquerque, NM
Mr. Scott Silverman , Varioscale, Inc, San Marcos, CA
Dr. Robert D. Chivas , Varioscale, Inc, San Marcos, CA

Summary:

Visible light laser voltage probing (LVP) for improved backside optical spatial resolution is demonstrated on ultra-thinned bulk Si samples. A prototype system for data acquisition, a method to produce ultra-thinned bulk samples, and LVP signal, imaging, and waveform acquisition are described
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