Complementary Analysis of Etching Residue on Aluminum Bond Pads by Scanning X-ray Photoelectron Spectroscopy and Transmission Electron Microscopy

Wednesday, November 4, 2015
Exhibit Hall D (Oregon Convention Center )
Mr. Gabriel Eng , Portland State University, Portland, OR
Matthew Hughes , Portland State University, Portland, OR
Zhiqiang Chen , Portland State University, Portland, OR

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