Dr. Jian-Shing Luo
Dr. Jian-Shing Luo
Department manager
Inotera Memories, Inc.
Physical Failure Analysis Department
Hwa-Ya Technology Park 667, Fuhsing 3rd Rd., Kueishan
Taoyuan
Taiwan
33383
Papers:
34.1
Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM