Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM

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Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM

Wednesday, November 4, 2015

Exhibit Hall D (Oregon Convention Center )

Mr. Hsiu-Pin Chen , Inotera Memories, Inc., Taoyuan, Taiwan

Dr. Jian-Shing Luo , Inotera Memories, Inc., Taoyuan, Taiwan

Ms. Ching-Shan Sung , Inotera Memories, Inc., Taoyuan, Taiwan

Mr. Chen-Kang Wei , Inotera Memories, Inc., Taoyuan, Taiwan

Mr. Kai-Lun Chiang , Inotera Memories, Inc., Taoyuan, Taiwan

Dr. Chia-Ming Yang , Chang Gung University, Taoyuan, Taiwan

Mr. Hsueh-Chun Liao , Chang Gung University, Taoyuan, Taiwan

Mr. Jahson Suo , Micron Technology, Boise, ID

Mr. Shifeng Lu , Micron Technology, Boise, ID