41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Mr. Roger Alvis

FEI Company
5350 NE Dawson Creek Drive
Hillsboro, OR
USA 97124

Papers:
16.2 Plasma FIB DualBeam™ Delayering for Atomic Force nanoProbing™ of 14 nm FinFET Devices in an SRAM Array