Dr. C H Chu
Dr. C H Chu
Materials Analysis Technology Inc.
1 A4, 1F, No.1, Lising Road 1, Science Based Industrial Park
Hsinchu
Taiwan
300
Papers:
16.2
Plasma FIB DualBeam™ Delayering for Atomic Force nanoProbing™ of 14 nm FinFET Devices in an SRAM Array