41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Mr. Katsunori Mizuguchi

Hitachi High-Tech Science Corporation
Tokyo Japan 104-0041

Papers:
34.2 Environmental Control Scanning Nonlinear Dielectric Microscopy Measurements of p-n Structures, epi-Si Wafers, and SiC Crystal Defects