41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Dr. Martin Herms

Dr
PVA Metrology and Plasma Solutions GmbH
Im Naßtal
6/8
Jena-Maua Germany D-07751

Papers:
9.1 Failure and stress analysis of Cu TSVs using GHz-scanning acoustic microscopy and polariscopy