41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Mr. Benedict Drevniok

Chipworks Inc.
1891 Robertson Road, Suite 500
Ottawa, ON
Canada K2H 5B7

Papers:
3.2 Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices using Microwave Impedance Microscopy