Mr. Aimin Li

Semiconductor Manufacturing International (Tianjin) Corporation
Failure Analysis Laboratory
19 Xing hua Avenue, Xi Qing Economic Development Area, P. R. China
TianJin China 300385

Papers:
2.2 Soft defect Localization on Analog and Mixed-signal ICs Using an OBIRCH Tool 11.2 SIMS Quantitative Analysis and Optimization for Ion Implantation Angle Deviation