Mr. Kai-Lun Chiang
Mr. Kai-Lun Chiang
Project manager
Inotera Memories, Inc.
Device Engineering Department
Hwa-Ya Technology Park 667, Fuhsing 3rd Rd., Kueishan
Taoyuan
Taiwan
33383
Papers:
34.1
Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM