41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Mr. Marc Kryger

Femtometrix
1850 Saint Andrew Place
Santa Ana, CA
USA 92705

Papers:
29.2 Characterization of 88/144 nm SOI Wafers Produced by Separate Process Technologies Using Optical Second Harmonic Generation