41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Wan-Yi Liu

Engineer
Materials Analysis Technology Inc.
Li Hsin Road
1
Hsinchu Taiwan 300

Papers:
16.2 Plasma FIB DualBeam™ Delayering for Atomic Force nanoProbing™ of 14 nm FinFET Devices in an SRAM Array