Mr. Shifeng Lu
Mr. Shifeng Lu
Micron Technology
N/A
Boise,
ID
USA
n/a
Papers:
34.1
Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM
Micron Technology
N/A
Boise,
ID
USA
n/a
Papers:
34.1
Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM