8
Microscopy

Tuesday, November 3, 2015: 11:10 AM-12:00 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Session Chairs:  Mr. Carl Nail, Failure Analysis Services, MTE Division, Evans Analytical Group, LLC, Irvine, CA and Dr. Tom Schamp, NSD, Hitachi High Technology America Inc., Dallas, TX
11:10 AM
8.1
Detection and Measurement of Intermetallic Thin Films Using EDX Line Scanning
Mr. Carl Nail, Evans Analytical Group, LLC
11:35 AM
8.2
Quantitative SiGe TEM Elemental Analysis in FinFET Test Structures
Dr. James J. Demarest, IBM; Dr. John Bruley, IBM T.J. Watson Research Center
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