Technique Selection for Front End of Line Defect Localization in Bulk Si FA

Sunday, November 6, 2016: 10:30 AM
108 (Fort Worth Convention Center)
Mr. Gregory M. Johnson , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Christopher D'Aleo , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Michael Iwatake , GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Chuan Zhang , GLOBALFOUNDRIES Inc., Malta, NY

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