High Throughput Phase Mapping for Metrology Using Low-loss EELS

Wednesday, November 8, 2017: 8:50 AM
Ballroom C (Pasadena Convention Center)
Dr. Lianfeng Fu , Lam Research Corporation, Fremont, CA
Dr. Lifan Chen , Western Digital, Fremont, CA
Dr. Haifeng Wang, PhD , Western Digital Corporation, Fremont, CA

See more of: Microscopy I
See more of: Technical Program