To Reveal Invisible Doping Defect by Nanoprobing Analysis, Simulation and Scanning Capacitance Microscopy

Monday, November 6, 2017: 3:50 PM

Ballroom C (Pasadena Convention Center)

Mr. Li-Lung Lai , Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, China

Summary:

There are three cases study to show the electrical, modeling and physical capabilities for doping FA.