A Study on ECC Failure Induced Latent Defect in between High-k MIM Capacitors

Wednesday, November 8, 2017
Mrs. Kim jinseon , samsung electronics, hwaseong-si, Korea, Republic of (South)
Dr. Nam incheol , samsung electronics, hwaseong-si, Korea, Republic of (South)
Dr. Kim minsoo , samsung electronics, hwaseong-si, Korea, Republic of (South)
Dr. Shin minju , samsung electronics, hwaseong-si, Korea, Republic of (South)

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