Nanoprobing and Electrical Characterization - Poster

Wednesday, November 8, 2017: 1:30 PM-3:30 PM
Mr. John Sanders, DCG Systems and Ms. Sweta Pendyala, Globalfoundries
A Study on ECC Failure Induced Latent Defect in between High-k MIM Capacitors
Mrs. Kim jinseon, samsung electronics; Dr. Nam incheol, samsung electronics; Dr. Kim minsoo, samsung electronics; Dr. Shin minju, samsung electronics
See more of: Technical Program