Application of Laser Deprocessing Techniques (LDT) to Improve the Job Efficiency & Throughput on Logic Device

Thursday, November 9, 2017: 10:40 AM
Ballroom C (Pasadena Convention Center)
Mr. H.H. Yap , GlobalFoundries, Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY
Jian Yu , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Lucile C.Teague Sheridan, Ph.D. , GLOBALFOUNDRIES Inc., Malta, NY
Donald Nedeau , GLOBALFOUNDRIES Inc., Malta, NY

Summary:

This paper will discuss another delayering method which can improve the job efficiency, cost-effectiveness and by introducing the combination of laser marking and Laser Deprocessing Technique (LDT) on the AOI region as a quick way to deprocess.