Exploring the Physical Limits of Gallium-based Focused Ion Beam (FIB) Chip Circuit Editing

Thursday, November 9, 2017: 2:20 PM

Ballroom C (Pasadena Convention Center)

Mr. Steven B. Herschbein , GLOBALFOUNDRIES, Hopewell Junction, NY

Mr. Carmelo F. Scrudato , GLOBALFOUNDRIES, Hopewell Junction, NY

Mr. Edward S. Hermann , GLOBALFOUNDRIES, Hopewell Junction, NY

Mr. Raymond L. Wagner , GLOBALFOUNDRIES, Hopewell Junction, NY

Summary:

Is it possible to modify a circuit by slicing a merged multi-finger FET in two with a Ga FIB, and have both halves still function normally?