FIB Circuit Analysis and Edit

Thursday, November 9, 2017: 2:20 PM-3:35 PM
Ballroom C (Pasadena Convention Center)
Dr. Ted R. Lundquist, Independent Contractor and Dr. Ken Lagarec, Fibics Incorporated
2:20 PM
Exploring the Physical Limits of Gallium-based Focused Ion Beam (FIB) Chip Circuit Editing
Mr. Steven B. Herschbein, GLOBALFOUNDRIES; Mr. Carmelo F. Scrudato, GLOBALFOUNDRIES; Mr. Edward S. Hermann, GLOBALFOUNDRIES; Mr. Raymond L. Wagner, GLOBALFOUNDRIES
2:45 PM
A QUANTITATIVE METHOD FOR MEASURING REMAINING SILICON THICKNESS DURING XEF2 FIB TRENCHING FOR BACKSIDE CIRCUIT OPERATIONS
Mr. Gregory Salazar, Sandia National Laboratories; Dr. Randy Shul, Sandia National Laboratories; Mr. Steven Ball, Sandia National Laboratories; Mr. Michael Rye, Sandia National Laboratories; Dr. Brian Phillips, Sandia National Laboratories; Dr. Michael DiBattista, Varioscale; Dr. Scott Silvermann, Varioscale
3:10 PM
Further inquiry into Xe+ as primary ion species for Circuit Edit application
Mr. Valery Ray, PBST, MEO Engineering Co., Inc.; Dr. Ali Hadjikhani, PhD, University of Connecticut, REFINE Lab; Mr. Joseph Favata, University of Connecticut, REFINE Lab; Ms. Bahar Ahmadi, University of Connecticut, REFINE Lab; Dr. Sina Shahbazmohamadi, PhD, University of Connecticut, REFINE Lab
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