High resolution localization using lock-in based electron beam methods

Monday, November 6, 2017: 4:15 PM
Ballroom C (Pasadena Convention Center)
Mr. Felix Rolf , Infineon Technologies AG, Neubiberg, Germany
Dr. Christian Hollerith , Infineon Technologies AG, Neubiberg, Germany
Mr. Christian Feuerbaum , Infineon Technologies AG, Neubiberg, Germany

See more of: Nanoprobing and Electrical Characterization I
See more of: Technical Program