Process Flow employed for Parametric Test Structure Shorts Fault Isolation in sub-22 nm technologies in high throughput Foundries

Wednesday, November 8, 2017
Mr. Satish Kodali , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Mia Nasimullah , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Yuting Wei , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , GlobalFoundries, Malta, NY
Dr. Felix Beaudoin , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Liangshan Chen , GLOBALFOUNDRIES, Malta, NY

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