Automated end-point detection and targeted Ar+ milling of an advanced integrated circuit FIB TEM specimens

Wednesday, November 8, 2017: 3:55 PM

Ballroom C (Pasadena Convention Center)

Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA

Dr. Pawel Nowakowski , E.A. Fischione Instruments, Inc., Export, PA

Dr. Michael J. Campin , E.A. Fischione Instruments, Inc., Export, PA

Mr. Jeremy T. Harbaugh , E.A. Fischione Instruments, Inc., Export, PA

Mr. Michael F. Boccabella , E.A. Fischione Instruments, Inc., Export, PA

Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA

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